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Features/Benefits ALIO Industries designs and manufactures high resolution precision linear and rotary stages for demanding nanometer applications. The precision stages are available with controllers and integrated process hardware and software or they can be pur- chased with our high resolution encoders and amps, ready for connection to OEM and customer controllers.

AI-80R-D Rotary Axis

Flexibility: Modular design for any multi-axis configura-tion. Linear, rotary and vertical stages for applica- tion specific kinematics. Complete systems for Plug and Play simplicity and low start up costs. Powerful motion controller for demanding alignment tasks and motion requirements. Price and Performance

AI-40R-D-HV Vacuum Rotary

High-resolution non-contact encoders for ex-ceptional repeatability. Ceramic servomotors provide high speed with fast settling time and no servo dither. Precision bearings assure high accuracy with long life. Efficient stage design provides exceptionally competitive value.

AI-80R-Q Custom Gimbal

CE compliant components and assemblies. Clean room and vacuum chamber ca pable. Rotary, Goniometric and Gimbal Axes Available