Motion system - Alio - #1

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x ALIO Industries – 11919 W. I-70 Frontage Road North, Unit 119, Wheat Ridge, CO 80033 – 303.339.7500 – www.alioindustries.com The ALIO Advantage: .. 1 to 6 DOF serial kinematic motion .. 6 DOF parallel kinematic motion .. Nano-resolution .. No Servo Dither (no oscillation) .. No Hysteresis .. No Backlash .. Fast settling time .. Compact, low-profile stages .. Vacuum compatible designs .. 10e-7 TORR .. 10e-10 TORR The advantage of ALIO Industries’ linear, rotary and parallel kinematic stages is dither-free, hysteresis-free, backlash-free precision nano resolution motion. The superior smooth motion of ALIO’s stages will not cause servo oscillation feedback through precise motion systems during positioning like traditional DC servo or linear motors can. ALIO’s low profile, high resonance frequency stages also offer quick settling times to help reduce cycle times. These added benefits lead to improved motion profiles for our customers’ complex needs. HEXAPODS AI-80R-Q AI-HEX-HR2-SS .. Fiber Alignment .. Waveguide Alignment .. Microscopy .. Micro/Nano Assembly .. Microlithography .. Vacuum Applications AI-HR2-1200E (XY) AI-D4-10000E-AB .. MEMS Assembly .. Laser Beam Steering .. Mirror Positioning .. Inspection/Metrology .. Micro-fabrication and more… Air Bearing Stages Stacked Serial Stages Vacuum Stages