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Features/Benefits ALIO Industries designs and manufactures high resolution precision linear and rotary stages for demanding nanometer applications. The precision stages are available with controllers and integrated process hardware and software or they can be pur-
chased with our high resolution encoders and amps, ready for connection to OEM and customer controllers. AI-HR4-10000E-XY Linear Ceramic Servo Stage Flexibility: Modular design for any multi-axis configura-tion. Linear, rotary, goniometric and vertical stages for application specific kinematics. Complete systems for plug-and-play simplicity and low start up costs. AI-LM-5000 Linear DC Servo Motor Stage Powerful
motion controller for demanding alignment tasks and motion requirements. Price and Performance High-resolution non-contact encoders for ex-ceptional repeatability. Ceramic servomotors provide high speed with fast settling time and no servo dither. AI-HR4-8000E-AP080-XY-UHV Linear DC motors provide high speed with high force. Precision crossed roller bearings assure high accuracy with long life. Efficient stage design provides exceptionally competitive value. CE compliant components and assemblies. AI-D8-40000E Linear Stage Clean room and vacuum chamber capable.
