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ANOMETER

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RECISION

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OBOTICS

ALIO Industries patented 3 and 6 degrees of freedom parallel kinematic robotic manipulator was designed for demanding nanometer precision applications. Applications in fiber optics, semi- conductor, medical, pharmaceutical and micro machining are just some of the uses. Parallel kine- matics increase repeatability and performance over stacked stage serial kinematic approaches. Features /Benefits: Quality and Performance: High-resolution 5 nm interpolated non-contact encoders for exceptional repeatability. Ceramic servo motors provide high speeds with fast settling time and no servo dither and no hys-teresis. Precision crossed roller bearings assure high accu- racy with long life. CE compliant components and assemblies. Vacuum chamber performance to 10e-10 TORR. Parallel kinematics are very rigid platforms that can easily withstand fiber bonding reac-tive forces or manipulating laser optics. Optional D.C. mode for 1 nm resolutions

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Increased repeatability over stacked stage se- rial kinematic structures. Simplified programming with tool center point (TCP). Ability to rotate TCP repeatability about a vir- tual point in space. Coordinated 6 axis of motion at TCP. System resolution versus summation of indi- vidual stage resolutions. Virtual elimination of stacked stage cosine and sine errors. Open architecture Windows operating system and intuitive GUI for application develop-ment. C++, Visual Basic and LabVIEW compatible.

AI-Hexapod 6 Axis Parallel Kinematic Robot U.S. Patent 6,671,975 & 6,769,194