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AI-ABL Series

Patent Pending

Ultra Precision Linear Air Bearing System

TheALIOAdvantage :

Planar Air Bearing for Superior Flatness (No Beam Sag) Advance Ceramic Servo Motors or High Force Linear Motors Decoupled Thermal Influences Travel Options Over a Meter Dual Y Axis Motion Control for Sub Arc Second Yaw Control Willing to Customize for OEM Applications Resolution: 5nm Standard, 38 picometerwith Laser Interferometer No Servo Dither (no oscillation) No Hysteresis No Backlash Fast settling time
ALIO Industries –11919 W. I-70 Frontage Road North, Unit 119, Wheat Ridge, CO 80033 –303.339.7500 –www.alioindustries.com