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Calibrator, Mass flow-meter, Vacuum gauge, Thermal mass flow controller, Controller
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Alicat Scientifi c, Inc. tel: 888 290 6060
7641 N Business Park Drive fax: 520 290 0109
Tucson AZ 85743 USA www.AlicatScientifi c.com 27
Specifi cation Mass Controller Description
Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure and Control
Typical Response Time 100 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Mass Reference Conditions
Operating Temperature -10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Controllable Flow Rate 102.4% Full Scale
Maximum Pressure 145 PSIG
Input /Output Signal Digital Mass Flow, Volumetric Flow, Pressure & Temperature RS-232 Serial or PROFIBUS1
Input / Output Signal Analog Mass Flow 0-5Vdc
Optional Input / Output Signal
Secondary Analog Mass Flow, Volumetric Flow, Pressure or Temperature 0-5 Vdc or 0-10Vdc
or 4-20mA
Electrical Connections 8 Pin Mini-DIN or DB-15
Supply Voltage 24 to 30 Vdc
Supply Current 0.750Amp
Mounting Attitude Sensitivity Control response somewhat sensitive to inverted operation.
Warm-up Time < 1 Second
Wetted Materials2 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced Nylon, Aluminum, 410
&416 Stainless Steel, Nickel, Silicon, Glass.
1. If selecting PROFIBUS no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS specifi cations for
PROFIBUS supply voltages and currents.
2. If your application demands a different material, please contact Application Assistance for available options.
Full Scale Flow Mass Controller Mechanical Dimensions Process Connections1 Pressure Drop2 (PSID)
50SLPM
4.7”H x 7.3”W x 2.3”D 1/4” NPT Female
9.0
100SLPM 11.7
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fi ttings. See page 45 for fi ttings.
2. Lower Pressure Drops Available, Please contact Application Assistance.
Mechanical Specifi cations
Technical Data for Moderate Flow Mass & Volumetric Flow Controllers
0 to 50SLPM Full Scale through 0 to 100SLPM Full Scale
The following specifi cations are for the standard confi guration of the Alicat product. There are many low-cost customization
options available.
50SLPM to 100SLPM approximate weight: 6.4 lb.
need graph
0
2
4
6
8
10
12
14
0% 20% 40% 60% 80% 100% 120%
% of Full Scale
PSI
Typical 50 SLPM, 100 SLPM Controller Pressure
Drop.
Improved Pressure Drops available.
— 100 SLPM
— 50 SLPM
MC Series
0-50SLPM
0-100SLPM
2X 8-32 UNC „¦v .500
Approx. 7.275
4X 8-32 UNC „¦v .375
4.667
1.750
.500
2.250
6.775
.300
1/4 NPT
Both Sides
1.125
.800 .800
1.125
.250 3.250
.375 .750
1.875
2.150
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