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Alicat Scientifi c, Inc. tel. 888. 290. 6060
2045 N Forbes Blvd. Bldg 103 fax. 520. 290. 0109
Tucson AZ 85745 USA www.AlicatScientifi c.com 17
Specifi cation Mass Meter Description
Accuracy ± (0.8% of Reading + 0.2% of Full Scale) At calibration conditions after tare
High Accuracy Option1 ± (0.4% of Reading + 0.2% of Full Scale) At calibration conditions after tare
Accuracy: Bi-directional Meters Only ± (0.8% of reading + 0.2% of total span positive full scale to negative full scale) At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 10 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Mass Reference Conditions
Operating Temperature -10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Measurable Flow Rate 128% Full Scale
Maximum Pressure 145 PSIG
Output Signal Digital Mass Flow, Volumetric Flow, Pressure & Temperature RS-232 Serial or PROFIBUS2
Output Signal Analog Mass Flow 0-5Vdc
Optional Output Signal
Secondary Analog Mass Flow, Volumetric Flow, Pressure or Temperature 0-5 Vdc or 0-10Vdc
or 4-20mA
Electrical Connections 8 Pin Mini-DIN or DB-15
Supply Voltage 7 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current 0.035Amp (+ output current on 4-20mA)
Mounting Attitude Sensitivity 0% Tare after installation
Warm-up Time < 1 Second
Wetted Materials3 303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced Nylon, Aluminum,
Silcon, Glass.
1. High Accuracy option not available for 2000SLPM units.
2. If selecting PROFIBUS no analog signal is available. PROFIBUS units do not have the display. See PROFIBUS specifi cations for
PROFIBUS supply voltages and currents.
3. If your application demands a different material, please contact Application Assistance for available options.
Full Scale Flow Mass Meter Mechanical Dimensions Process Connections1 Pressure Drop2 (PSID)
500SLPM
5.0”H x 4.0”W x 1.6”D
3/4” NPT Female
5.5
1000SLPM 6.0
1500SLPM 9.0
2000SLPM 5.0”H x 5.2”W x 2.9”D 5.0
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter fi ttings. See page 45 for fi ttings.
2. Venting to atmosphere. Lower Pressure Drops Available, Please contact Application Assistance.
Mechanical Specifi cations
Technical Data for High Flow Mass Flow Meters
0 to 500 SLPM Full Scale through 0 to 4000 SLPM Full Scale
The following specifi cations are for the standard confi guration of the Alicat product. There are many low-cost customization options
available. For meters above 2000SLPM, please contact Alicat.
500SLPM to 1500SLPM approximate shipping weight: 3.5lb 2000SLPM approximate shipping weight: 4.5lb
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M Series
0-2000SLPM
4X 8-32 UNC „¦v .330
2.500
5.200
2.500
.250
1.450
.800
3/4 NPT
2.900
4.967
1.450
.800
1.250
3/4 NPT
M Series
0-500SLPM
0-1000SLPM
0-1500SLPM
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.......................... .......... 4X 8-32 UNC „¦v .375
.800
.800
.800
.800
4.967
3/4 NPT Both Sides
4.000
3.250
1.425
.175 .750
Alicat Scientifi c, Inc. tel: 888 290 6060
2045 N Forbes Blvd. Bldg 103 fax: 520 290 0109
Tucson AZ 85745 USA www.AlicatScientifi c.com
Alicat Scientifi c, Inc. tel: 888 290 6060
7641 N Business Park Drive fax: 520 290 0109
Tucson AZ 85743 USA www.AlicatScientifi c.com
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