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PAD CONDITIONERS FOR ALL CMP PLATFORMS

CMPPADCONDITIONING Abrasive Technology’s pad conditioning disks operate on all major CMP equipment platforms around the world in oxide(ILD, STI, POLY, BPSG)and metal (W, Cu, Ta, Al)processes. Disks are available in both magnetic and non-magnetic grades of stainless steel in a wide variety of front surface configurations. The ability to dial in customers’ CMP process requirements allows ATI to deliver conditioning solutions in the shortest possible time. A
LSOAVAILABLE :D
ISKSFOR 300
MMSYSTEMS Applied MaterialsEbara Speedfam - IPECStrasbaugh LAM Research (2” dia.) COSTOFOWNERSHIPPRODUCTCONSISTENCY ISO

9001

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