Gas & Pump Line Heaters & Controllers - A&N Corporation - #2

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A&N Corporati on High Vacuum Components Since 1965 Section 15 15.2 A&N Corporation 707 Southwest 19th Avenue Williston, Florida 32696 (352) 528-4100 1(800) FLANGE1 FAX (352) 528-3441 www.ancorp.com All ® Registered Trademarks are the property of their respective companies, see Intro. pg. 7. (352) 528-4100 • 1(800) FLANGE1 • www.ancorp.com Gas & Pump Line Heaters & Controllers - Introduction Optimize Process Performance with Line Heaters and Controll ers from A&N Corp. General Applications Gas Delivery Lines • Boron trichloride, BCI3 • Chlorine trifluoride, ClF3 • Dichlorosilane, (DCS), SiH2Cl2 • Tetra ethyl orthosilicate, TEOS • Tungsten hexafluoride, WF6 • P rocess gas line qualification Fore line and exhaust lines for CVD and metal etch. • Low Pressure Chemical Vapor Deposition (LPCVD) - TEOS, Ti Nitride • P lasma Enhanced Chemical Vapor Deposition (PECVD) - TEOS, Ti Nitride, Tungsten, Oxynitride Plasma etch • Aluminum etch • Tungsten etch Features and Benefits Even heating up to 200¢ªC (392¢ªF) uniform temperature profiles over the entire heated line • Eliminates cold spots that result in condensation or particle buildup in the line Precision electronic temperature controllers; flexible to changing process requirements • Electronic controllers with PID temperature algorithms provide <1¢ªC control stability Precise fit for optimal efficiency • A&N heaters are specifically designed to fit high vacuum components, eliminating cold spots from loose-fitting heaters or uncovered lines. Cleanroom compatible silicone rubber construction • Clean heaters will not contribute to particle generation System components meet a combination of UL®, CE, NEC and SEMI S2-93 safety specifications • Construction materials and electrical circuit comply to UL®, CE (EMI) and FM safety standards Environmental safety • Reducing particle buildup decreases potential of employee exposure to hazardous materials during normal cleaning cycles