LHV Tubes for laboratory testing on new formulations - 3M Purification Inc. - (Version JPG) - PDF Catalogue | Technical Documentation

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Liquid filter, Ceramic filter, Cartridge filter, Self-cleaning filter, Seal

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a 3M company

NanoSHIELD™ LHV FilterTubes

Low Hold-Up Volume Testing of Experimental Photoresists and Ancillary Chemicals

offered in several configurations to allow the end user to match the volume of fluid with the appropriate filter in an effort to reduce chemical waste.

NanoSHIELD LHV filter tubes are ideally suited for critical applications requiring high particle retention and high flow rates at 0.01, 0.02, 0.05, and 0.1 urn.

Full Scale-Up - The NanoSHIELD Filter Family

Laboratory Testing on New

Formulations

LHV Tubes

(Not Shown)

NanoSHIELD LHV filter tubes have been specially designed to provide superior particle retention and low hold-up volume for advanced photoresists and ancillary chemicals. Utilizing Hollow Fiber Technology (HFT), NanoSHIELD filters are able to deliver high flow rates with low hold-up volume, to minimize the waste of experimental photoresist formulations. The tubes are offered in 1/4" and 3/8" outside diameters thereby allowing common compression fittings to connect directly to the outside of the NanoSHIELD LHV tube. In addition, a syringe can also be injected directly into the tube.

These small compact filter tubes allow material suppliers to assess parameters such as material compatibility, photo-speed, particle retention, and lithography in a rapid and cost effective manner. NanoSHIELD LHV filter tubes contain the same filter media as full size NanoSHIELD filter cartridges and capsules, ensuring a consistent level of quality throughout laboratory, pilot, and full-scale production testing. The NanoSHIELD family of products is

Pilot Scale Production up to 1 gallon

SDC Capsules

Pilot Scale Production up to 5 gallons

MDC Capsules

Pilot Scale Production up to 100 gallons

LDC

Capsules

Full Scale Production greater than 100 gallons

Filter

Cartridges


	Applications
	■ 193nm Photoresists	■ Alcohols
	■ ARC, BARC, TARC	■ Bases
	■ Etchants / Strippers	■ Developers
	■ Polyimide	■ Solvents


	Features	Benefits
	■ Hollow Fiber Technology	■ More filtration per surface area as compared to pleated filters ■ Provides both lower operating and differential pressure across the filter to minimize outgassing and micro-bubble formation
	■ Polypropylene and Polyethylene Construction	■ Excellent chemical resistance to photoresists and ancillary chemicals ■ No IPA pre-wetting and system flushing required
	■ 0.01 urn and 0.02 urn Retention Ratings	■ Superior removal of particles, gels, and micro-bubbles ■ Reduced micro-bridge and wafer level defects for 193nm photoresists
	■ Small Compact Design	■ Reduced hold-up volume and waste of expensive chemicals

LHV Tubes for laboratory testing on new formulations - 3M Purification Inc. - #1

Liquid filter, Ceramic filter, Cartridge filter, Self-cleaning filter, Seal