LDC cartridge for pilot scale production up to 100 gallons - 3M Purification Inc. - (Version JPG) - PDF Catalogue | Technical Documentation

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NanoSHIELD™ LDC Filter Capsules

Superior Defect Reduction from Advanced Photoresists and Chemicals

NanoSHIELD LDC filter capsules have been specially designed to

extract from surface modified and or improperly manufactured filters, which may reduce shelf life and or change the photo-speed, viscosity, or molecular weight of the photo-chemical.

combine the highest level of particle retention with superior flow rates and minimal pressure drop for demanding high viscosity chemical applications. Utilizing Hollow Fiber Technology (HFT), NanoSHIELD filters are

•I


	Applications
	■ 193nm Photoresists	■ Alcohols
	■ ARC, BARC, TARC	■ Bases
	■ Etchants / Strippers	■ Developers
	■ Polyimide	■ Solvents

able to deliver superior flow with minimal pressure drop, while maintaining the highest level of filter efficiency in a small disposable design.

All filters are critically cleaned, integrity tested, and rinsed with high purity water to provide fast start-up times and low extractables right out of the box. The small compact design of NanoSHIELD LDC filter capsules make them ideally suited for critical applications requiring low hold-up volume with superior flow rates and high particle retention at 0.01, 0.02, 0.05, and 0.1 pm.

NanoSHIELD Capsule Construction

The filters polypropylene and polyethylene materials of construction combined with quality manufacturing ensure that ionic, organic, and metallic contaminants are not being added back into the process fluid. Ionic, organic, and metallic contaminants can

5"LDC Capsule Flow vs Differential Pressure (1cps @ 25°C)

0.6

□

a m

0.4

¡5 c

a 5

S 5

0.2

2 4

Fluid Flow Rate (GPM)

5 10 15

Fluid Flow Rate (LPM)


Features	Benefits
■ Hollow Fiber Technology	■ Up to 3 times more surface area as compared to equivalent sized capsules ■ Provides both lower operating and differential pressure across the filter to minimize outgassing and micro-bubble formation ■ Reduces hold-up volume and "dead space" by eliminating the filter core ■ Increased lifetime, throughput, and overall equipment effectiveness (OEE)
■ Polypropylene and Polyethylene Construction	■ Excellent chemical resistance to photoresists and ancillary chemicals ■ No IPA pre-wetting and system flushing required - eliminates a potential source of contamination and chemical interaction, while reducing downtime
■ 0.01 urn and 0.02 urn Retention Ratings	■ Superior removal of particles, gels, and micro-bubbles ■ Reduced micro-bridge and wafer level defects for 193nm photoresists
■ Superior Flow Rates	■ Flow rates 3 - 8 times higher as compared to competitive pleated capsules while r sacrificing particle removal efficiency	lot A
■ Quality Manufacturing	■ Manufactured in a cleanroom to reduce particle adders and extractables ■ All filters are critically cleaned and integrity tested to ensure process repeatability	ré

LDC cartridge for pilot scale production up to 100 gallons - 3M Purification Inc. - #1

Housing, Liquid filter, Self-cleaning filter, Ceramic filter, Seal